Electromechanical Modeling and Simulation of MEMS-Based Piezoelectric Vibration Energy Harvesting Device Using PZT-5H Material

https://doi.org/10.31130/ud-jst.2023.340ICT

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Author

  • Tuan Ngoc Dao
    The University of Danang - Vietnam Korea University of Information and Communication Technology
    Phuoc Thanh Quang Le
    The University of Danang - Vietnam Korea University of Information and Communication Technology
    Tho Quang Than
    Central Power Corporation (EVNCPC), Danang, Vietnam
    Son Thanh Nguyen
    National Institute of Technology, Kushiro College, Japan
    Tung Thanh Huynh
    The University of Danang - University of Science and Technology
    Phuoc-Anh Le
    College of Engineering and Computer Science, VinUniversity, Hanoi, Vietnam
    Than Hong Phuc
    Duy Tan University, Vietnam
    Cong-Kha Pham
    The University of Electro-Communications (UEC), Tokyo, Japan

Từ khóa:

Piezoelectric
MEMS
energy Harvesting
piezoelectric materials
finite element analysis

Tóm tắt

In this study, we describe the operation of piezoelectric energy converters and electromechanical modeling of piezoelectric energy harvesting (PEH) devices based on microelectromechanical systems (MEMS) for low-power sensors. Consideration is given to a piezoelectric energy harvester based on standard MEMS. The parameters are determined and optimized using a simple MEMS cantilever model. On top of a Brass substrate, the model uses a single layer of piezoelectric material. We  utilized the finite element method (FEM) models created with software tools NanoHUB and COMSOL to  analyze the electromechanical behavior of MEMS-based piezoelectric energy harvesting (PEH) devices. The electromechanical modeling was applied to predict the modal and harmonic response of the PEH devices. By using a modal analysis, the resonant frequencies are 182 Hz for the FEM models of the PZT-5H PEH device through NanoHUB and COMSOL. The simulated MEMS can provide a voltage between 1.7 and 1.9 mV, 0.074 µW of output power. The produced voltage and output power may be increased by connecting the piezoelectric layers in parallel and series. And the Internet of Things (IoT) sensors might be driven by this array of devices.

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Jun 30, 2023
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Dao, T. N., P. T. Q. Le, T. Q. Than, S. T. Nguyen, T. T. Huynh, P.-A. Le, T. H. Phuc, và C.-K. Pham. “Electromechanical Modeling and Simulation of MEMS-Based Piezoelectric Vibration Energy Harvesting Device Using PZT-5H Material”. Tạp Chí Khoa học Và Công nghệ - Đại học Đà Nẵng, vol 21, số p.h 6.2, Tháng Sáu 2023, tr 25-32, doi:10.31130/ud-jst.2023.340ICT.

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